AVS 47th International Symposium
    Magnetic Interfaces and Nanostructures Tuesday Sessions
       Session MI+NS+NANO 6-TuM

Paper MI+NS+NANO 6-TuM3
'Magnetic-Laboratory' on an AFM Tip

Tuesday, October 3, 2000, 9:00 am, Room 206

Session: Magnetic Imaging I
Presenter: B.K. Chong, University of Glasgow, UK
Authors: B.K. Chong, University of Glasgow, UK
H.P. Zhou, University of Glasgow, UK
G. Mills, University of Glasgow, UK
L. Donaldson, University of Glasgow, UK
J.M.R. Weaver, University of Glasgow, UK
Correspondent: Click to Email
We present novel magnetic nanosensors based on the functionalisation of an AFM probe for use in measuring, imaging and manipulating magnetic specimens. The probes are fabricated using bulk silicon micromachining and electron-beam nanolithography (EBL). The use of conventional lithographic techniques and a microfabricated substrate allows the batch production of a large number of similarly functionalised probes without the need for individual processing of single probes and hence gives very good reproducibility.@footnote 1@ We have demonstrated two classes of magnetic probe. The eMFM probe is one in which the permanent magnetic coating used in conventional MFM tips is replaced by a small electro-magnetic coil to form a magnetic-sensitive AFM tip. Initial results indicate controllability of coil size (spatial resolution) to 1/4 µm diameter, demonstrated capability of magnetic imaging and possible application in local magnetic modification. The Hall bar magnetometer for SHPM, is also integrated with a tip and cantilever. This involved the development of a new fabrication technique in which the resist was supported by a lattice of sacrificial structures which spanned the spaces between probes. This allowed the use of low melting point or chemically reactive materials as the sensor. The combination of eMFM and Hall bar magnetometer forms a novel type of magnetic sensor-actuator probe, a 'Magnetic-Lab' on a tip. Such a probe will allow the magnetic imaging of a specimen without significant distortion due to stray fields from the probe using Hall probe magnetometry as well as the deliberate modification of its magnetic state using the coil. @FootnoteText@ @footnote 1@ H.Zhou, G.M. Mills, B.K.Chong, L. Donaldson & J.M.R. Weaver, 'Recent Progress in the Functionalisation of AFM Probes using Electron-Beam Nanolithography', J. Vac. Sci. Technol. A17(1) 2233-9(1999).